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Design and evaluation of low-profile micro ultrasonic motors driven by sector shaped piezoelectric vibrators

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3 Author(s)
Kanda, T. ; Grad. Sch. of Natural Sci. & Technol., Okayama Univ., Okayama, Japan ; Ichihara, T. ; Suzumori, K.

In order to miniaturize micro mechatronics systems and portable devices, there are increasing needs for low-profile and high power micro actuators. The aim of this paper is to improve the transducer of low-profile micro ultrasonic motors. This motor has two sector-shaped vibrators and the pre-load mechanism. In this research, the pre-load mechanism was redesigned by the finite element method and the beam width of the pre-load mechanism was changed partly. The pre-load systems that used a new pre-load mechanism design were fabricated and evaluated.

Published in:

Ultrasonics Symposium (IUS), 2009 IEEE International

Date of Conference:

20-23 Sept. 2009