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In order to miniaturize micro mechatronics systems and portable devices, there are increasing needs for low-profile and high power micro actuators. The aim of this paper is to improve the transducer of low-profile micro ultrasonic motors. This motor has two sector-shaped vibrators and the pre-load mechanism. In this research, the pre-load mechanism was redesigned by the finite element method and the beam width of the pre-load mechanism was changed partly. The pre-load systems that used a new pre-load mechanism design were fabricated and evaluated.
Ultrasonics Symposium (IUS), 2009 IEEE International
Date of Conference: 20-23 Sept. 2009