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Optical fibre array manufacture using electrostatic actuation

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7 Author(s)
Weiland, D. ; Microsyst. Eng. Centre, Heriot-Watt Univ., Edinburgh, UK ; Luetzelschwab, M. ; Abraham, E. ; Desmulliez, M.P.Y.
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A novel method to manufacture two-dimensional bundles of single mode optical fibres at sub-micron pitch accuracy is presented. An array of holes, each surrounded by four electrodes has been produced using the UV-LIGA process. Electrostatic fields between the electrodes and a metal coated optical single mode fibre inserted into such a hole, are used to position the fibre. The position of the fibre core can be monitored and moved to its ideal position. Using thermal or UV activation a cement filling the hole around the fibre is cured to fix the fibre in place.

Published in:

Advanced Packaging Materials: Microtech, 2010. APM '10. International Symposium on

Date of Conference:

Feb. 28 2010-March 2 2010