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A 0.2 μm Emitter Bipolar Technology for Low Cost and High Performance Mixed Analog/Digital Applications

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7 Author(s)
Miwa, Hiroyuki ; Bipolar/CCD LSI Division, Semiconductor Company, SONY Corporation, 4-14-1, Asahi-cho, Atsugi-shi, Kanagawa-ken, 243 Japan ; Ammo, Hiroaki ; Kato, Katsuyuki ; Ejiri, Hirokazu
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A 0.2 μ m emitter bipolar technology with improved LOCOS isolation for low cost and high performance mixed analog/digital applications is presented. The technology features high speed transistors (Tpdmin=21ps, fTmax=30GHz), high ß and high emitter-base breakdown voltage transistors (β=700, BVebo=10V), low power IIL (Tpd*Pd=9fJ/gate), and triple layers of metal. Total process steps are reduced to 80% by means of improved LOCOSprocess instead of deep trench isolation, which is 22% less than our 0.8 μ m BiCMOS process steps. An HDD R/W Amp. IC, which needs BVebo of more than 4V, was realized using high β and high BVebo transistor. A 2.5GHz 2R IC was also realized, and the high-speed transistor performance was confirmed.

Published in:

Solid State Device Research Conference, 1996. ESSDERC '96. Proceedings of the 26th European

Date of Conference:

9-11 Sept. 1996