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The development of Optoelectronic Integrated Circuits (OEICs) using planar integration technologies for good yields of fine linewidth (1Â¿m) FETs and novel notch PIN diodes is discussed. In particular the horizontal integration of a GaAs MESFET circuit with a PIN diode is demonstrated and used to produce single and four channel receivers. These circuits have good sensitivities (-29.3dBm at 250Mbit/s) and represent state of the art levels of integration.
Date of Conference: 16-19 Sept. 1991