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Demonstration of integrated micro-electro-mechanical switch circuits for VLSI applications

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13 Author(s)
Fred Chen ; Massachusetts Institute of Technology, Cambridge, USA ; Matthew Spencer ; Rhesa Nathanael ; Chengcheng Wang
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A testchip demonstrates monolithic integration of micro-electro-mechanical (MEM) switch circuit building blocks for logic, timing, I/O and memory functions. Experimental results show functionality for an inverter, XOR, carry-generation block, oscillator, DAC, latch, and 10-cell DRAM.

Published in:

2010 IEEE International Solid-State Circuits Conference - (ISSCC)

Date of Conference:

7-11 Feb. 2010