A temperature sensor utilizing NPN transistors has been realized in a 65 nm CMOS process. It achieves a batch-calibrated inaccuracy of ±0.5°C (3σ) and a trimmed inaccuracy of ±0.2°C (3σ)from -70°C to 125°C The sensor draws 8.3 μA from a 1.2 V supply and occupies an area of 0.1 mm2.
Published in:
Solid-State Circuits Conference Digest of Technical Papers (ISSCC), 2010 IEEE International
Date of Conference: 7-11 Feb. 2010