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An algorithm is presented for the fast and accurate simulation of power/ground mesh structures. Our method is a direct (non-iterative) approach for simulation based upon a parallel matrix inversion algorithm. The new dimension of flexibility provided by our algorithm allows for a more accurate analysis of power/ground mesh structures using resistance, inductance, capacitance, interconnect models. Specifically, we offer a method that employs a sparse approximate inverse technique to consider more reluctance coupling terms for increased accuracy of simulation. Our algorithm shows substantial computational improvement over the best known direct and iterative numerical techniques that are applicable to these large-scale simulation problems.