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In this paper, we used the particle-in-cell/Monte Carlo techniques 1 Dimension 3 Velocities and 3 Dimensions 3 Velocities to simulate low-pressure radio-frequency (RF) discharge in argon. The plasma conditions are 50-100 mtorr of pressure and 200 V of peak RF voltage at 13.56 MHz. The method used in collision treatment is based on an optimized estimation of the collision free path which is independent of the electron energy. It depends only on the maximum of total cross sections. To reduce the number of null collisions, two maximums of total cross sections are chosen. The results obtained were compared with data from experiments that were already carried out.
Date of Publication: April 2010