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A novel low actuation voltage RF MEMS shunt capacitive switch

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2 Author(s)
Sahu, A.K. ; Radar Div., Chandipur (DRDO), Balasore, India ; Sarkar, B.K.

A low actuation voltage MEMS shunt capacitive switch has been investigated in this paper. The MEMS switch is a freely moving membrane over co planar waveguide, the beam of the switch is serpentine spring and actuation is achieved by electrostatic mechanism. Actuation voltage achieved is of the order of 4 to 5 volt with down state capacitance of 3.77 pF and spring constant of 1.451 N/m.

Published in:

Applied Electromagnetics Conference (AEMC), 2009

Date of Conference:

14-16 Dec. 2009