By Topic

Employment of Electric Potential to Build a Gas-Selective Response of Metal Oxide Gas Sensor Array

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Ilia Kiselev ; Institute of Microstructure Technology, Karlsruhe Institute of Technology, Karlsruhe, Germany ; Martin Sommer ; Jaswinder Kaur Mann ; Victor V. Sysoev

This paper presents an approach to design multisensor microarrays for electronic nose instruments employing a metal oxide thin film whose spatial gas-sensitive properties are locally differentiated by electric potential. The measurement of local potential as a sensor signal over the metal oxide film serves to build a gas discriminating pattern which can be selectively identified by pattern recognition techniques. The gas sensitivity studies have revealed a higher gas response on the film areas, which are activated by positive potential, than that at earth potential. The gas-recognition capability of potential patterns is, at least, comparable with the one of conductance patterns recorded at the same microarrays differentiated by nonhomogeneous spatial heating. The experimental data are discussed in terms of oxide surface charging by adspecies coming through the ambient air. The suggested approach could be considered for designing reproducible multisensor systems on a single-chip platform.

Published in:

IEEE Sensors Journal  (Volume:10 ,  Issue: 4 )