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Employment of Electric Potential to Build a Gas-Selective Response of Metal Oxide Gas Sensor Array

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4 Author(s)
Kiselev, I. ; Inst. of Microstructure Technol., Karlsruhe Inst. of Technol., Karlsruhe, Germany ; Sommer, M. ; Mann, J.K. ; Sysoev, V.V.

This paper presents an approach to design multisensor microarrays for electronic nose instruments employing a metal oxide thin film whose spatial gas-sensitive properties are locally differentiated by electric potential. The measurement of local potential as a sensor signal over the metal oxide film serves to build a gas discriminating pattern which can be selectively identified by pattern recognition techniques. The gas sensitivity studies have revealed a higher gas response on the film areas, which are activated by positive potential, than that at earth potential. The gas-recognition capability of potential patterns is, at least, comparable with the one of conductance patterns recorded at the same microarrays differentiated by nonhomogeneous spatial heating. The experimental data are discussed in terms of oxide surface charging by adspecies coming through the ambient air. The suggested approach could be considered for designing reproducible multisensor systems on a single-chip platform.

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Sensors Journal, IEEE  (Volume:10 ,  Issue: 4 )