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Electron beam induced current investigations of Pt/SrTiO3-x interface exposed to chemical and electrical stresses

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5 Author(s)
Jiang, W. ; Department of Materials Science and Engineering, Carnegie Mellon University, 5000 Forbes Avenue, Pittsburgh, Pennsylvania 15213, USA ; Evans, D. ; Bain, J.A. ; Skowronski, M.
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Pt Schottky contacts were fabricated on oxygen deficient SrTiO3-x [001] single crystals. Electron beam induced current (EBIC) and atomic force microscopy images taken on etched SrTiO3 (001) surfaces revealed that the dark {001} oriented lines observed in EBIC correlate with arrays of dislocation etch pits. Annealing contacts in air (at 120 °C for 10 min) changed the dislocation-related EBIC contrast from dark to bright. Electrically stressing the air-annealed Schottky contacts at -10 V for 1 h caused the dislocation-related EBIC contrast to return to dark. The contrast changes are interpreted as arising from oxygen vacancy motion in response to chemical or electrical stresses.

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Applied Physics Letters  (Volume:96 ,  Issue: 9 )