Referenced Items are not available for this document.
Indium tin oxide (ITO) films have been deposited at room temperature by DC magnetron sputtering and grown on a cholesteric liquid crystal (Ch-LC) layers. The surface morphology and electrical properties of ITO thin films was analyzed by scanning electron microscope, 3-dimension microscope and four-point prober. In a systematic study, the enhancement of electrical properties of ITO films was achieved by a novel two-steps deposition process. In addition, it was apparent that the surface roughness of ITO films deposited on Ch-LC layers by two-steps process was improved as well. A surface roughness of 0.509 ¿m and a sheet resistance of 87.98 ohm/sq has been obtained by two steps process.
Published in:
Nanoelectronics Conference (INEC), 2010 3rd International
Date of Conference: 3-8 Jan. 2010
- Page(s):
- 997 - 998
- E-ISBN :
- 978-1-4244-3544-9
- Print ISBN:
- 978-1-4244-3543-2
- INSPEC Accession Number:
- 11169907
- Conference Location :
- Hong Kong
- Digital Object Identifier :
- 10.1109/INEC.2010.5425079
- Product Type:
- Conference Publications
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