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In-situ transmission electron microscopy study of nanotwinned copper under electromigration

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5 Author(s)
Chien-Neng Liao ; Dept. of Mater. Sci. & Eng., Nat. Tsing Hua Univ., Hsinchu, Taiwan ; Kuan-Chia Chen ; Wen-Wei Wu ; Lih-Juann Chen
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Nanotwinned copper has drawn growing attention recently due to its substantially enhanced mechanical strength and negligible increase in electrical resistivity. The stability of nanotwins under mechanical and electrical stressing becomes a critical consideration. Using a high resolution transmission electron microscopy, we observed that the {112} incoherent twin boundary (TB) and {111} coherent TB migrate at a rate of 0.06 ~ 0.09 nm/s in copper under an electric current density of 2×106 A/cm2. The TB migration is possibly associated with an atomic step moving along either {111} or {112} plane and the TB migration rate is mainly controlled by the incubation time of forming new atomic steps. To form such atomic steps, EM-induced diffusion at junctions where TBs meet a grain boundary or free surface may play an important role.

Published in:
Nanoelectronics Conference (INEC), 2010 3rd International

Date of Conference: 3-8 Jan. 2010

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