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Apparently anomalous and transient piezoresistive effects are observed from CMOS transistors and diffused resistors fabricated on 20 Â¿m thin, flexible chips for system-in-foil (SiF) applications. We show that this effect results from a transformation of uniaxial to biaxial stress according to the Poisson ratio of the visco-elastic epoxy glue used for chip attachment. This effect is further analyzed through current mirror circuits composed of orthogonally oriented transistors.
Electron Devices Meeting (IEDM), 2009 IEEE International
Date of Conference: 7-9 Dec. 2009