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First autonomous wireless sensor node powered by a vacuum-packaged piezoelectric MEMS energy harvester

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12 Author(s)
Elfrink, R. ; Holst Centre, IMEC, Eindhoven, Netherlands ; Pop, V. ; Hohlfeld, D. ; Kamel, T.M.
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This paper describes the experimental characterization of piezoelectric harvesters with different dimensions. We present a record level of generated power of 85 ¿W obtained from an unpacked device. We have developed a wafer-scale vacuum package which shows a 100-200 fold increase in power output compared with packaged devices under atmospheric pressure. A wireless sensor node was fully powered by a piezoelectric harvester. The average power consumption was less than 10 ¿W while it was operating at 15 seconds duty cycle.

Published in:

Electron Devices Meeting (IEDM), 2009 IEEE International

Date of Conference:

7-9 Dec. 2009