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A low value normally on RF-MEMS switched capacitor For high Q millimeter wave tuning

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5 Author(s)
Barriere, F. ; XLIM, Univ. de Limoges, Limoges, France ; Crunteanu, A. ; Pothie, A. ; Chatras, M.
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RF-MEMS are allowing the practical fabrication of high Q tunable elements, such as tuners filters, or cavities. The MEMS capacitor can be switched between 14 fF and 4 fF, with a very low series resistance. Significant contrast could be obtained with extremely low value capacitances, and low series resistance.

Published in:

Silicon Monolithic Integrated Circuits in RF Systems (SiRF), 2010 Topical Meeting on

Date of Conference:

11-13 Jan. 2010