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A temperature-compensated 1.5 GHz film bulk acoustic wave resonator (FBAR)-based frequency reference implemented in a 0.35 ??m CMOS process is presented. The ultra-small form factor (0.79 mm ?? 1.72 mm) and low power dissipation (515 ??A with 2 V supply) of a compensated FBAR oscillator present a promising alternative for the replacement of quartz crystal frequency references. The measured post-compensation frequency drift over a 0-100??C temperature range is <??10 ppm. The measured oscillator phase noise is -133 dBc/ Hz at 100 kHz offset from the 1.5 GHz carrier.