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An automated approach on electrical technology characterization and analysis

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4 Author(s)
Perell, C. ; CSIC, Barcelona, Spain ; Lozano, M. ; Millan, J. ; Lora-Tamayo, E.

An automated electrical characterization environment has been implemented. The automated approach covers electrical test structure design, measurement, parameter extraction, and parameter statistical analysis. The structure design generator relies on symbolic process description and hierarchic design organization to overcome technology changes. When the technology monitors are generated, position information is given to the characterization environment. The parameters that characterize a technology are extracted using the test structure library, that also includes an SPICE level 3 extractor usable on cartographic measurements directly on-wafer. The system permits the implementation of an extraction strategy, thus identifying the technology drawbacks and saving extraction time. Extracted data sets are properly saved to allow a final statistical analysis in order to identify data limits, wafer homogeneity, parameter correlation, and correlation factors, assuming a central moment distribution

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Semiconductor Manufacturing, IEEE Transactions on  (Volume:9 ,  Issue: 4 )