A Semiconductor-Based 10-GHz Optical Comb Source With Sub 3-fs Shot-Noise-Limited Timing Jitter and $\sim$500-Hz Comb Linewidth

In this work, a 10.287-GHz semiconductor-based harmonically mode-locked laser with 1000 finesse intracavity etalon is demonstrated. The timing jitter integrated from 1 Hz to 100 MHz (Nyquist) is 3 fs (14 fs). The optical linewidth is ~500 Hz and the optical frequency stability is <150 kHz over 30 s.