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Liquid Core ARROW Waveguides by Atomic Layer Deposition

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5 Author(s)
Genni Testa ; Istituto per il Rilevamento Elettromagnetico dell Ambiente, Consiglio Nazionale delle Ricerche, Naples, Italy ; Yujian Huang ; Luigi Zeni ; Pasqualina M. Sarro
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We report on the use of the atomic layer deposition (ALD) process for fabricating liquid core antiresonant reflecting optical waveguides (ARROWs). The ALD permits the deposition of a very conformal sub-100-nm titanium dioxide antiresonant layer. This results in a low loss liquid core ARROW waveguide with a broadband output transmission spectrum. Optical transmitted spectrum from the fabricated structure has been reported, and the measured attenuation losses agree with the theoretical predictions.

Published in:

IEEE Photonics Technology Letters  (Volume:22 ,  Issue: 9 )