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Liquid Core ARROW Waveguides by Atomic Layer Deposition

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5 Author(s)
Testa, G. ; Ist. per il Rilevamento Elettromagnetico dell Ambiente, Consiglio Naz. delle Ric., Naples, Italy ; Huang, Yujian ; Zeni, L. ; Sarro, P.M.
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We report on the use of the atomic layer deposition (ALD) process for fabricating liquid core antiresonant reflecting optical waveguides (ARROWs). The ALD permits the deposition of a very conformal sub-100-nm titanium dioxide antiresonant layer. This results in a low loss liquid core ARROW waveguide with a broadband output transmission spectrum. Optical transmitted spectrum from the fabricated structure has been reported, and the measured attenuation losses agree with the theoretical predictions.

Published in:

Photonics Technology Letters, IEEE  (Volume:22 ,  Issue: 9 )

Date of Publication:

May1, 2010

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