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This paper proposes a silicon-on-insulator (SOI) photodetector with gold (Au) line and space. (L/S) grating, which enhances light absorption via optical near-field by surface plasmon (SP) around the grating. Behavior of the enhanced light absorption for various grating widths, adjustment of the peak absorption wavelength, and dependence on the polarization of the incident light are discussed based on the electromagnetic simulations.
Silicon Nanoelectronics Workshop, 2008. SNW 2008. IEEE
Date of Conference: 15-16 June 2008