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A 1.5 Mb/s operation of a MARS device for communications systems applications

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5 Author(s)

We present the fabrication and performance of a Si MARS (mechanical antireflection switch) micromechanical optical modulator for fiber-in-the-loop applications. Device performance is reported showing rise and fall times of less than 100 ns, greater than 10 dB optical contrast ratio at ambient temperatures from -50 to 90°C, and evidence of reliability exhibited in operation at 500 kHz for over two months (two trillion cycles) without noticeable loss in performance. Bit error rate measurements show potential performance at 1.5 Mb/s with a 10 -9 bit error rate. Emphasis is placed on our efforts to produce a device which is practical, robust, and inexpensive to manufacture and package

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Lightwave Technology, Journal of  (Volume:14 ,  Issue: 10 )