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Low-loss passive polymer optical waveguides with high environmental stability

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7 Author(s)
M. Usui ; NTT Opto-Electron. Labs., Tokyo, Japan ; M. Hikita ; T. Watanabe ; M. Amano
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Deuterated polysiloxane with high transparency and high thermal stability was newly synthesized for use as optical waveguide material. Single-mode channel waveguides using the polymer were fabricated by conventional photolithography and dry etching. The propagation loss of the channel waveguides was measured and found to be 0.17 dB/cm at 1.31 μm and 0.43 dB/cm at 1.55 μm. The thermal and environmental stability of the waveguides was demonstrated by the fact that the propagation loss remained unchanged after tests at 200°C for 30 min, at 120°C for 1000 h, and at 75°C and 90% RH for 1000 h

Published in:

Journal of Lightwave Technology  (Volume:14 ,  Issue: 10 )