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Highly flexible membrane systems for micromachined microphones - modeling and simulation

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5 Author(s)
Tounsi, F. ; Electron., Microtechnol. & Commun. (EMC) Res. Group, Nat. Eng. Sch. of Sfax, Sfax, Tunisia ; Rufer, L. ; Mezghani, B. ; Masmoudi, M.
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This paper presents a mechanical modeling of membrane systems applicable to micromachined microphones requiring a low stiffness constant. We have recently developed a single-chip electrodynamic microphone in a CMOS MEMS technology. The microphone consists of a suspended square membrane of 1.4 mm side, 3 ¿m thick and 10 ¿g, and two concentric inductors. This suspended moving membrane is fixed to the substrate with 4 attachments arms. In order to achieve a desired flat frequency response characteristic, covering the entire acoustic band, several attachment designs are presented, studied and compared. These designs include crab-leg, meander, U-spring and serpentine forms. We have found that for comparable dimensions, the U-spring form presents the highest compliance and the meander type is the stiffest.

Published in:

Signals, Circuits and Systems (SCS), 2009 3rd International Conference on

Date of Conference:

6-8 Nov. 2009