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Integrated optics in silicon and SiGe-heterostructures

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7 Author(s)
Schuppert, Bernd ; Fachgebiet Hochfrequenztech., Tech. Univ. Berlin, Germany ; Schmidtchen, J. ; Splett, A. ; Fischer, U.
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This paper reviews various techniques and ideas in the field of integrated optics in silicon, mainly focused on silicon in conjunction with germanium. We will discuss different approaches for waveguides, passive and active components in silicon as well as recent developments in the fabrication and performance of such components. For waveguides in silicon, the characteristics such as losses and spot-sizes are given, showing that silicon could be an attractive candidate for integrated optical devices

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Lightwave Technology, Journal of  (Volume:14 ,  Issue: 10 )