Referenced Items are not available for this document.
Doped polysilicon is applied as a thermo-optic heating element to temperature tune the ring resonator based on silicon nitride rib waveguides on silicon. The ring diameter is 2 mm allowing a large free spectral range of 26 GHz. For the first time, a poly-Si resistor is used as a thermistor to measure waveguide temperature. The temperature coefficient of the poly-Si thermistor is 9.5×10-4/°C. The reproducibility of the temperature measurement is 0.3°C. The finesse of the ring resonator is 77. The propagation loss of silicon nitride rib waveguide is 0.5 dB/cm at the wavelength of 1.312 μm. The temperature tuning of the ring resonator and the in situ supervision of the temperature on chip based on the same poly-Si fabrication process may find use especially in optical sensor applications
Published in:
Lightwave Technology, Journal of
(Volume:14
,
Issue:
10
)
Date of Publication: Oct 1996
- Page(s):
- 2260 - 2267
- ISSN :
- 0733-8724
- INSPEC Accession Number:
- 5414031
- Digital Object Identifier :
- 10.1109/50.541217
- Product Type:
- Journals & Magazines
- Date of Current Version :
- 06 August 2002
- Issue Date :
- Oct 1996
- Sponsored by :
- IEEE Aerospace and Electronic Systems Society
About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies
A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2013 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.
