Referenced Items are not available for this document.
A new technique based on photolithography has been developed to fabricate a fiber probe with a nanometric protruding tip for near field optical microscopy. As a first step, an optical fiber is sharpened by chemical etching and coated with metallic film. Next, it is coated with photoresist and its apex region is selectively exposed to an evanescent wave. Finally, the metallic film at the apex region is etched away. The foot diameter of the protrusion fabricated by this method is about 30 nm
Published in:
Lightwave Technology, Journal of
(Volume:14
,
Issue:
10
)
Date of Publication: Oct 1996
- Page(s):
- 2224 - 2230
- ISSN :
- 0733-8724
- INSPEC Accession Number:
- 5414025
- Digital Object Identifier :
- 10.1109/50.541211
- Product Type:
- Journals & Magazines
- Date of Current Version :
- 06 August 2002
- Issue Date :
- Oct 1996
- Sponsored by :
- IEEE Aerospace and Electronic Systems Society
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