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Following our previous study on the material-quality limiting factors of evaporated solid-phase crystallized (SPC) poly-Si thin films fabricated on planar glass for photovoltaic applications, we extend our study to investigate the impurity levels, optical properties, transport properties, and device performance of so-called Â¿EVAÂ¿ (EVAporated Si) solar cells. These potentially cost-effective cells are systematically characterized with electron microscopy-based techniques, external quantum efficiency, and standard current-voltage measurements. We conclude that 5% efficient cells are now attainable, and much room remains for further improving device performance. We are confident that 10%-efficient EVA solar cells will be realized in the future, with proper metallization schemes, good light trapping, and improved poly-Si film quality.