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Exploring design spaces for optical MEMS devices

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1 Author(s)
Gilbert, J.R. ; Microcosm Technol. Inc., Cambridge, MA, USA

The MEMCAD system enables the designer of Optical Micro-Electro-Mechanical Systems to explore interesting design spaces in simulation. In this paper we investigate the space of torsional micromirrors and explore three specific micromirror designs.

Published in:

Advanced Applications of Lasers in Materials Processing/Broadband Optical Networks/Smart Pixels/Optical MEMs and Their Applications. IEEE/LEOS 1996 Summer Topical Meetings:

Date of Conference:

5-9 Aug. 1996