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Manufacturing process improvements using advanced control methodologies

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1 Author(s)
Alvi, N.S. ; SEMATECH, Austin, TX, USA

Implementation of advanced control on a manufacturing tool requires the integration of several modules like performance specification, sensors, system models, and a control framework. This paper discusses the implementation of real-time process control and run-to-run process control on furnace chemical vapor deposition (CVD), rapid thermal processing (RTP), and chemical mechanical polishing (CMP). Results demonstrating throughput enhancement and tighter process tolerances are presented

Published in:

Electronic Manufacturing Technology Symposium, 1995, Proceedings of 1995 Japan International, 18th IEEE/CPMT International

Date of Conference:

4-6 Dec 1995