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A microtip self-written on a vertical-cavity surface-emitting laser by photopolymerization

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9 Author(s)
Bardinal, V. ; LAAS, CNRS, 7 Avenue du colonel Roche, F-31077 Toulouse, France and UPS, INSA, INP, ISAE, LAAS, Université de Toulouse, F-31077 Toulouse, France ; Reig, B. ; Camps, T. ; Daran, E.
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We present the integration of a self-aligned microtip on a vertical-cavity surface-emitting laser (VCSEL) by near infrared photopolymerization. This one-step fabrication process is triggered by the laser source itself. It is based on the use of photopolymers sensitive at the lasing wavelength and can be applied to VCSEL devices after their process fabrication. We have characterized the fabricated microtips and shown that they focus laser light at few micrometers from the device. The applications of this simple method may concern VCSEL beam shaping as well as the fabrication of microprobes for near-field optical microscopy.

Published in:

Applied Physics Letters  (Volume:96 ,  Issue: 5 )

Date of Publication:

Feb 2010

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