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An electrostatically-tunable switching micromirror using [110] silicon wafers

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3 Author(s)
Kyoung-Sun Seo ; Dept. of Mech. Eng., Korea Adv. Inst. of Sci. & Technol., Seoul, South Korea ; Young-Ho Cho ; Sung-Kie Youn

A bulk-micromachined electrostatic micromirror has been designed, fabricated and tested for applications to tunable optomechanical switching microdevices. Static deflections of the micromirror have been measured up to 26.5 /spl mu/m with a DC threshold voltage of 330 V. Resonant switching frequencies have been tuned in the ranges of 580-450 Hz by varying the DC bias voltage within 50-300 V for an AC drive voltage of 10 V.

Published in:

Advanced Applications of Lasers in Materials Processing/Broadband Optical Networks/Smart Pixels/Optical MEMs and Their Applications. IEEE/LEOS 1996 Summer Topical Meetings:

Date of Conference:

5-9 Aug. 1996