By Topic

Excimer lasers as tools for material processing in manufacturing

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

1 Author(s)
Endert, H. ; Lambda Phys. GmbH, Gottingen, Germany

Since their initial demonstration 20 years ago, excimer lasers have developed from physicists' "toys" to powerful tools, offering unique benefits to a wide range of applications. Nearly all technical (plastics, ceramics, glasses, metals, semiconductors, composites) and biological/medical materials can be structured by the intense ultraviolet (UV) laser lights. Drilling of microholes for ink jet nozzle heads and for MCM microelectronic packaging, stripping of very tiny wires, annealing of TFT's for flat panel displays and high quality marking are well-known industrial introduced examples of this technique. Recently two very important breakthroughs were achieved. The first is in regard to the performance of the excimer laser itself. The second one is a much more advanced way of using UV photons more efficiently.

Published in:

Advanced Applications of Lasers in Materials Processing/Broadband Optical Networks/Smart Pixels/Optical MEMs and Their Applications. IEEE/LEOS 1996 Summer Topical Meetings:

Date of Conference:

5-9 Aug. 1996