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Switch-Matrix-Based High-Density Microelectrode Array in CMOS Technology

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12 Author(s)
Urs Frey ; Bio Engineering Laboratory, Department of Biosystems Science and Engineering, ETH Zurich, Switzerland ; Jan Sedivy ; Flavio Heer ; Rene Pedron
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We report on a CMOS-based microelectrode array (MEA) featuring 11, 011 metal electrodes and 126 channels, each of which comprises recording and stimulation electronics, for extracellular bidirectional communication with electrogenic cells, such as neurons or cardiomyocytes. The important features include: (i) high spatial resolution at (sub)cellular level with 3150 electrodes per mm2 (electrode diameter 7 ¿m, electrode pitch 18 ¿m); (ii) a reconflgurable routing of the recording sites to the 126 channels; and (iii) low noise levels.

Published in:

IEEE Journal of Solid-State Circuits  (Volume:45 ,  Issue: 2 )