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Photonic Device Layout Within the Foundry CMOS Design Environment

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2 Author(s)
Orcutt, J.S. ; Res. Lab. of Electron., Massachusetts Inst. of Technol., Cambridge, MA, USA ; Ram, R.J.

A design methodology to layout photonic devices within standard electronic complementary metal-oxide-semiconductor (CMOS) foundry data preparation flows is described. This platform has enabled the fabrication of designs in three foundry scaled-CMOS processes from two semiconductor manufacturers.

Published in:
Photonics Technology Letters, IEEE  (Volume:22 ,  Issue: 8 )

Date of Publication: April15, 2010

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