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In order to realize the stability and the accuracy of particle inversion algorithm, on the basis of present commonly used algorithm, one kind of particle size distributed stochastic inversion algorithm is proposed. The algorithm combines the advantage of the annealing evolution algorithm and the genetic algorithm and has the stronger global convergence. The algorithm has ability to distinguish the distribution of single and the twin peaks accurate, and doesn't need any prior information based on this inversion algorithm. The localization of peak value of particle size is high. The experiment can achieve the reasonable distribution of particle size.