By Topic

Design, fabrication, and calibration of capacitive air gap sensors for the application in levitation based guides in microactuators

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Denkena, B. ; Inst. of Production Eng. & Machine Tools, Leibniz Univ. Hannover, Garbsen, Germany ; Kayapinar, H. ; Gatzen, H.-H. ; Pape, F.

The development of a capacitive sensor for controlling the gap of contactless guides in microactuators is presented in this paper. The counter electrode of the capacitive air gap sensor is kept free from electric leads and the dimension of the active region of the sensor is 445 ¿m × 950 ¿m. For the fabrication of the sensor, thin-film processes were applied. The capacitance at the upper measurement range of 15 ¿m represents 125 fF. An appropriate evaluating circuit provides enough resolution to operate at the pre-defined gap of 7 ¿m.

Published in:

Sensors, 2009 IEEE

Date of Conference:

25-28 Oct. 2009