By Topic

A Novel calorimetric flow sensor implementation based on thermal sigma-delta modulation

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

7 Author(s)
Cerimovic, S. ; Inst. for Integrated Sensor Syst., Austrian Acad. of Sci., Wiener Neustadt, Austria ; Talic, A. ; Beigelbeck, R. ; Sauter, T.
more authors

Miniaturized calorimetric flow sensors suffer from a limited measurement range if operated with constant heating power. To overcome this drawback, we utilize a thermal sigma-delta modulator to achieve a constant average excess temperature of the sensor membrane. The duty cycle of the modulator output fully covers the flow information. This novel method exhibits the advantage that the slope of the output characteristic and hence the flow sensitivity can be optimized for a certain flow range by choosing an appropriate amplitude of the heating voltage. Finally, the influence of the clock frequency on the system accuracy was investigated by extensive SPICE modeling of the thermal system.

Published in:

Sensors, 2009 IEEE

Date of Conference:

25-28 Oct. 2009