Design and fabrication of a hollow micro-disk mass sensor

In this paper, a novel hollow micro-disk mass sensor based on mode generation and degeneration principle is presented, which has the advantages of self-compensating environmental fluctuation and eliminating viscous damping as vacuum packaged. The device configuration, including the width of support beams, the channel height and the allocation of the sensing piezoresistors are carefully analyzed and then designed to achieve better sensitivity. Using a double sacrificial layer process along with DRIE, the sensor was successfully fabricated and the preliminary test has been accomplished.