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Static deflection control for sensitivity enhancement of piezoelectric ultrasonic microsensors on silicon dioxide diaphragms

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4 Author(s)
Yamashita, Kaoru ; Grad. Sch. of Sci. & Technol., Kyoto Inst. of Technol., Kyoto, Japan ; Noda, M. ; Yoshizaki, T. ; Okuyama, Masanori

Sensitivity of piezoelectric ultrasonic microsensors has been enhanced through static deflection control on silicon dioxide diaphragm structures. A precise deflection control process has been developed for fragile SiO2 diaphragms derived from a both-side oxidized normal silicon wafer. The diaphragms have been re-buckled upward without breaking and the sensitivity has been improved by four times on average on the deflection-controlled SiO2 diaphragm sensors.

Published in:

Sensors, 2009 IEEE

Date of Conference:

25-28 Oct. 2009