By Topic

Design and modeling of an all-optical frequency modulated MEMS strain sensor using nanoscale Bragg gratings

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

6 Author(s)
Kasper Reck ; Department of Micro and Nanotechnology, Technical University of Denmark (DTU), 2800, Kgs. Lyngby, Denmark ; Ninia S. Almind ; Mikkel Mar ; Jörg Hübner
more authors

We present modeling and design of an all-optical MEMS Bragg grating (half-pitch of 125 nm) strain sensor for single-fiber distributed sensing. Low optical loss and the use of frequency modulation rather than amplitude modulation, makes this sensor better suited for distributed systems than comparable designs, e.g. Fabry-Perot and Mach-Zender. Also, multiplexing of several sensors with different period gratings, allow sensors to be connected to a single fiber, thereby minimizing cabling and simplifying readout. We show through analytical analysis and finite element modeling (FEM) that large mechanical amplification can be obtained if using an angled double beam micrometer scale MEMS structure, compared to conventional fiber Bragg grating sensors. An optimized design and fabrication process is presented.

Published in:

Sensors, 2009 IEEE

Date of Conference:

25-28 Oct. 2009