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FDSOI Process Technology for Subthreshold-Operation Ultralow-Power Electronics

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5 Author(s)
Vitale, S.A. ; Solid State Technol. Div., Massachusetts Inst. of Technol., Lexington, MA, USA ; Wyatt, P.W. ; Checka, N. ; Kedzierski, J.
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Ultralow-power electronics will expand the technological capability of handheld and wireless devices by dramatically improving battery life and portability. In addition to innovative low-power design techniques, a complementary process technology is required to enable the highest performance devices possible while maintaining extremely low power consumption. Transistors optimized for subthreshold operation at 0.3 V may achieve a 97% reduction in switching energy compared to conventional transistors. The process technology described in this article takes advantage of the capacitance and performance benefits of thin-body silicon-on-insulator devices, combined with a workfunction engineered mid-gap metal gate.

Published in:
Proceedings of the IEEE  (Volume:98 ,  Issue: 2 )

Date of Publication: Feb. 2010

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