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Dielectrophoresis force (DEP) has been the most common way to manipulate Carbon nanotubes either multi walled carbon nanotbues(MWCNTs) or single walled carbon nanotubes(SWNTs) for the fabrication of nanoscale electronic devices, recently. Nevertheless, with limitation of substrate areas or the restriction of operation voltage of substrate, for example the chip with circuits based on CMOS-NEMS, dielectrophoresis force is not the best method to fabricate nanoscale devices. Therefore, we here demonstrate a new method for the fabrication of the nanoscale devices based on CNTs. We first functionalize carbon nanotubes, and then combine transfer-printing mechanism with aligned carbon nanotubes networks by DEP process. In this work, we successfully perform CNTs alignment on the large scale parallel electrodes via DEP. Also, current-induced electrical breakdown is introduced to eliminate undesired type of SWCNTs, which could improve the yield of nanoscale devices such as CNTFETs. Afterwards transferring the alignment of Carbon nanotubes by PDMS is implemented to the functionalized gold electrodes. By means of it, we can easily fabricate MOSFETs, Bio-sensors or Gas sensors based on CMOS-NEMs process scale or where it is not appropriated to perform DEP to construct nanoscale devices.
Date of Conference: 26-30 July 2009