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Magnetoresistive sensor based scanning probe microscopy

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5 Author(s)
D. R. Sahoo ; IBM Zürich Research Laboratory, Rüschlikon, Switzerland ; A. Sebastian ; W. Häberle ; H. Pozidis
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Integrated sensors are essential for scanning probe microscopy (SPM) based systems where a large number of cantilevers are employed in parallel for high-throughput. However, common integrated sensors such as piezoresistive, piezoelectric, capacitive and thermoelectric, suffer from low bandwidth and/or low resolution. In this work, a novel magnetoresistive (MR) sensor based scanning probe microscopy technique is presented which can detect the deflection of the cantilever with nano-scale resolution and a bandwidth in excess of 1 MHz. This technique is suitable for high-speed imaging using integrated sensors which can be fabricated using micro-electromechanical-system (MEMS) and thin-film technology to make large scale parallel-SPM devices.

Published in:

Nanotechnology, 2009. IEEE-NANO 2009. 9th IEEE Conference on

Date of Conference:

26-30 July 2009