Skip to Main Content
The memory characteristics of IrOx metal nanocrystals in an n-Si/SiO2/Al2O3/IrOx/Al2O3/IrOx structure with a small EOT of ˜6 nm have been investigated. The IrOx metal nanocrystals with a small size of ˜3 nm and high-density of ˜0.7??1013/cm2 have been observed. The enhanced memory characteristics with a large memory window of ΔV˜4V at a small gate voltage of ≪5V and good endurance of 104 cycles are achieved due to the charge storage in the IrOx nanocrystals.
Date of Conference: 26-30 July 2009