By Topic

Design of an electrostatic MEMS microgripper system integrated with force sensor

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Kinnan Amjad ; Faculty of Electronic Engineering, GIK Institute of Engineering Sciences &Technology, Topi, Pakistan ; Shafaat A. Bazaz ; Yongjun Lai

This work presents the design of a microgripper integrated with force sensor using electrostatic actuation. The single capacitance sensor used in the design can also operate as an actuator when force sensing is not required. The design is optimized in the standard MEMS technology SOIMUMPs. An input voltage of 85 V produces a force of 384 ¿N and a displacement of 15 ¿m. In dual actuation mode, the gripper jaws are displaced 15 ¿m at an input voltage of 60 V. A concept of two stage jaw is given which increases the range of object size gripped to 30 ¿m without increasing the size or input voltage of the actuator.

Published in:

2008 International Conference on Microelectronics

Date of Conference:

14-17 Dec. 2008