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Polymer Dielectric Films

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1 Author(s)

Polymer dielectric films, ranging in thickness from less than 100 A to several microns, have become increasingly useful for basic investigations of surface phenomena and thin film electrical conductivity and for thin film electronic device and circuit development. The preparation and characterizing properties of thin polymer films are discussed with particular emphasis on recent developments in such areas as ultraviolet surface photolysis, electron bombardment, gaseous electrical discharge, and special chemical processes. Previously unpublished data on certain aspects of polymer dielectric films are presented, and present and potential applications are briefly reviewed.

Note: The Institute of Electrical and Electronics Engineers, Incorporated is distributing this Article with permission of the International Business Machines Corporation (IBM) who is the exclusive owner. The recipient of this Article may not assign, sublicense, lease, rent or otherwise transfer, reproduce, prepare derivative works, publicly display or perform, or distribute the Article.  

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IBM Journal of Research and Development  (Volume:12 ,  Issue: 2 )