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Man-made Superlattice Crystals

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2 Author(s)
A. E. Blakeslee ; IBM Thomas J. Watson Research Center, Yorktown Heights, New York 10598, USA ; C. F. Aliotta

Multiple closely spaced layers of GaAs1−xPx, which approximate a one-dimensional crystalline superlattice, have been created by periodically pulsing PH3 into an AsH3-PH3-Ga-HCl vapor-growth apparatus. The phosphorus mole fraction varies between maximum and minimum values with a period typically less than 200Å. Structures with up to 150 such layers have been produced. The crystal growth process and methods of characterization are discussed briefly.

Note: The Institute of Electrical and Electronics Engineers, Incorporated is distributing this Article with permission of the International Business Machines Corporation (IBM) who is the exclusive owner. The recipient of this Article may not assign, sublicense, lease, rent or otherwise transfer, reproduce, prepare derivative works, publicly display or perform, or distribute the Article.  

Published in:

IBM Journal of Research and Development  (Volume:14 ,  Issue: 6 )